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- High-vacuum pump down time is reduced by 25% to 75%.
- High-speed pumping of water vapor :
7,000~100,000 Lit/sec in the workspace.
- Increase of production rate from 20% to 100%.
- Typical payback time is less than one year.
- Lower water vapor partial pressure during processing for higher
quality, better adhesion and more reproducible deposition.
- Superior cost/peformance of meissner coils are used
instead of liquid nitrogen. |
- Cryo generator is used at vacuum system and production output is increased
with reduction of pump-down time.
- Water vapor is pumped within 3 (three) minutes and the frost elimination is started
within 4 (four) minutes, thus providing fast-cycle capability and reduction of pump down
time by 25-27%, consequently resulting in production rate increase of 20~100%.
- In the event you need an application of temperature range of -90กษ~-150กษ under the
condition of an unusual vacuum or non vacuum, please be kindly in contact with us. |
